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A β-SiC MOSFET Monte Carlo simulator including inversion layer quantization

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2 Scopus citations

Abstract

Electron transport properties in SiC quantized inversion layers have been studied by means of a Monte Carlo procedure. It has been observed that the contribution of polaroptical phonon scattering produces a significant influence of the effective-electric field on the high longitudinal field transport regime, this being the main difference of SiC with respect to standard Si inversion layers. The energy- and momentum-relaxation times have been calculated and the results suggest that electron velocity overshoot effects are less important than in Si MOSFETs. The electron mobility is not very different from their silicon counterparts, but the saturation velocity is higher.

Original languageEnglish
Pages (from-to)257-260
Number of pages4
JournalVLSI Design
Volume8
Issue number1-4
DOIs
StatePublished - 1 Jan 1998
Externally publishedYes

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