Abstract
A complete Monte Carlo study of phonon-limited electron mobility in (100) silicon-inversion layers has been carried out. It has been determined advantageous to consider more than three energy subbands for electron motion. First-order intervalley scattering has also been shown to play an important role in ohmic transport. The results of the Monte Carlo simulation can be fitted by a simple analytical expression that coincides with the phonon-limited mobility for the bulk in the zero transverse-electric-field limit.
| Original language | English |
|---|---|
| Pages (from-to) | 3289-3292 |
| Number of pages | 4 |
| Journal | Journal of Applied Physics |
| Volume | 74 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1 Dec 1993 |
| Externally published | Yes |
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