Abstract
We have studied in depth the performance of superficial and buried strained-Si/SixGe1-x channel Metal-Oxide-Semiconductor Field-Effect-Transistors (MOSFET). To do so, we developed a two-dimensional simulator in which Poisson, Schrodinger and Boltzmann equations have been self-consistently solved. The dependences of the performance enhancement on the germanium mole fraction obtained in these devices both at low- and high-longitudinal electric fields in the channel are described. The simulator has been validated by reproducing experimental results.
| Original language | English |
|---|---|
| Pages (from-to) | 547-549 |
| Number of pages | 3 |
| Journal | Computer Physics Communications |
| Volume | 121 |
| DOIs | |
| State | Published - 1 Jan 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1998 Europhysics Conference on Computational Physics (CCP 1998) - Granada, Spain Duration: 2 Sep 1998 → 5 Sep 1998 |