Construcción de equipo de recubrimiento por centrifugación de bajo costo para deposición de películas delgadas de TiO2 sobre diferentes sustratos

Segundo Jonathan Rojas Flores, L. Pajares-Huallan, M. Rodriguez-Yupanqui, Luis Angelats-Silva, H. Leon-Leon, Moises Miguel Gallozzo Cardenas

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A device for the manufacture of thin films by coating was constructed by centrifugation (spin coating). A timer motor was used to control the constant speeds of 1000 to 6000 rpm for 100 s. which were measured with an optical tachometer. TiO2 films manufactured by the team were deposited on three different substrates (ITO, Si and glass), annealed at 500 ° C after the tenth layer, in order to improve their structure. The films were characterized by a scanning electron microscope (MEB), X-ray diffractogram (DRX) and Fourier transform Infrared (FTIR). The DRX shows that all films have pure anatase structure, with a preferential growth in the peak (101), the FTIR shows the vibration mode in the 433 cm-1 peak belonging to the anatase phase. The results of the MEB show the thicknesses of the films are in the order of nanometers, the TiO2 films deposited on Si those having a thickness of 332.10 nm, less than half compared to the other two. It is concluded that it was possible to build a low-cost spin coating equipment verified with the manufacture of uniform TiO2 films.

Translated title of the contributionConstruction equipment spin coating cost low for thin film deposition of TiO2 on different substrates
Original languageSpanish
Title of host publication18th LACCEI International Multi-Conference for Engineering, Education Caribbean Conference for Engineering and Technology
Subtitle of host publication"Engineering, Integration, and Alliances for a Sustainable Development" "Hemispheric Cooperation for Competitiveness and Prosperity on a Knowledge-Based Economy", LACCEI 2020
PublisherLatin American and Caribbean Consortium of Engineering Institutions
ISBN (Electronic)9789585207141
DOIs
StatePublished - 2020
Event18th LACCEI International Multi-Conference for Engineering, Education Caribbean Conference for Engineering and Technology: "Engineering, Integration, and Alliances for a Sustainable Development" "Hemispheric Cooperation for Competitiveness and Prosperity on a Knowledge-Based Economy", LACCEI 2020 - Virtual, Online
Duration: 27 Jul 202031 Jul 2020

Publication series

NameProceedings of the LACCEI international Multi-conference for Engineering, Education and Technology
ISSN (Electronic)2414-6390

Conference

Conference18th LACCEI International Multi-Conference for Engineering, Education Caribbean Conference for Engineering and Technology: "Engineering, Integration, and Alliances for a Sustainable Development" "Hemispheric Cooperation for Competitiveness and Prosperity on a Knowledge-Based Economy", LACCEI 2020
CityVirtual, Online
Period27/07/2031/07/20

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