Abstract
The effects of the average inversion-layer penetration, which are termed the inversion-layer centroid, on the inversion-charge density and the gate-to-channel capacitance have been analyzed. The quantum model has been used, and a variety of data have been obtained by self-consistently solving the Poisson and Schrödinger equations. An empirical expression for the centroid position that is valid for a wide range of electrical and technological variables has been obtained and has been applied to accurately model the inversion-layer density and capacitance.
| Original language | English |
|---|---|
| Pages (from-to) | 1915-1922 |
| Number of pages | 8 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 44 |
| Issue number | 11 |
| DOIs | |
| State | Published - 1 Dec 1997 |
| Externally published | Yes |
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