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Electron trapping and detrapping in near-interfacial traps during Fowler-Nordheim tunneling injection at 77 K

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4 Scopus citations

Abstract

Results of injection experiments at 77 K, alternated with ascensions to room temperature are reported. Two trapping behaviours have been identified, with a relationship between them being noted. Both donor and acceptor interface traps have also been observed to be created. Results can be interpreted with a model based on oxide traps with energies above the silicon conduction band.

Original languageEnglish
Pages (from-to)317-320
Number of pages4
JournalMicroelectronic Engineering
Volume28
Issue number1-4
DOIs
StatePublished - 1 Jan 1995
Externally publishedYes

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