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Experimental determination of the effective mobility in NMOSFETs: a comparative study

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Abstract

We present a comparison between the different methods reported in the literature to experimentally determine the electron mobility in the channel of a MOSFET. In order to accurately obtain the mobility for use in an I-V model a suitable determination of inversion charge and electric potential is shown to be relevant. Numerical simulation is demonstrated to be a powerful tool to carry out mobility extraction, particularly in the moderate-inversion region, and to accurately calculate the effective electric field.

Original languageEnglish
Pages (from-to)701-707
Number of pages7
JournalSolid State Electronics
Volume43
Issue number4
DOIs
StatePublished - 1 Jan 1999
Externally publishedYes

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