Abstract
We present a comparison between the different methods reported in the literature to experimentally determine the electron mobility in the channel of a MOSFET. In order to accurately obtain the mobility for use in an I-V model a suitable determination of inversion charge and electric potential is shown to be relevant. Numerical simulation is demonstrated to be a powerful tool to carry out mobility extraction, particularly in the moderate-inversion region, and to accurately calculate the effective electric field.
| Original language | English |
|---|---|
| Pages (from-to) | 701-707 |
| Number of pages | 7 |
| Journal | Solid State Electronics |
| Volume | 43 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1 Jan 1999 |
| Externally published | Yes |
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