Resumen
A complete Monte Carlo study of phonon-limited electron mobility in (100) silicon-inversion layers has been carried out. It has been determined advantageous to consider more than three energy subbands for electron motion. First-order intervalley scattering has also been shown to play an important role in ohmic transport. The results of the Monte Carlo simulation can be fitted by a simple analytical expression that coincides with the phonon-limited mobility for the bulk in the zero transverse-electric-field limit.
| Idioma original | Inglés |
|---|---|
| Páginas (desde-hasta) | 3289-3292 |
| Número de páginas | 4 |
| Publicación | Journal of Applied Physics |
| Volumen | 74 |
| N.º | 5 |
| DOI | |
| Estado | Publicada - 1 dic. 1993 |
| Publicado de forma externa | Sí |